Synthesis, characterization, and investigation of a conformationally immobile calix[6]arene as a negative electron beam resist-Reference-Cited by-同舟云学术

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Synthesis, characterization, and investigation of a conformationally immobile calix[6]arene as a negative electron beam resist

Published:2005 Issue:5 Volume:23 Page:1998
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Monreal Gabriel H.,Staggs Sara J.,Blanda Michael T.,Geerts Wilhelmus J.,Galloway Heather C.,Spencer Gregory F.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Functionalization dependence of the electron beam sensitivity for a conformationally immobile calix[6]arene resist;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-07

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