Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching-Reference-Cited by-同舟云学术

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Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching

Published:2014-01 Issue:1 Volume:32 Page:011204
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

González Iván Prieto,Muñoz Camuñez Luis Enrique,Taboada Alfonso González,Robles Urdiales Carmen,Ripalda Cobián Jose María,Postigo Resa Pablo Aitor

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4836517

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High finesse microcavities in the optical telecom O-band;Applied Physics Letters;2021-11-29

2. Electroabsorption in gated GaAs nanophotonic waveguides;Applied Physics Letters;2021-03-29

3. On‐Chip Nanomechanical Filtering of Quantum‐Dot Single‐Photon Sources;Laser & Photonics Reviews;2020-06-08

4. Numerical Study on Mie Resonances in Single GaAs Nanomembranes;Nanomaterials;2019-06-05

5. Benefit of birefringence for the direct generation of polarization-entangled photon pairs;Optics Express;2017-07-21

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