Process issues with Mo∕a-Si:H Schottky diode and thin film transistors integration for direct x-ray detection
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Published:2004-09
Issue:5
Volume:22
Page:2091-2095
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Lee Czang-Ho,Vygranenko Yuriy,Nathan Arokia
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics