Design specific variation in via/contact pattern transfer: Full chip analysis
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Published:2009
Issue:6
Volume:27
Page:2962
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ISSN:1071-1023
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Choy Jun-Ho,Sukharev Valeriy,Markosian Ara,Kteyan Armen,Granik Yuri,Bliznetsov Vladimir
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics