In situ pressure measurements in small gettered volumes
-
Published:2002
Issue:6
Volume:20
Page:2018
-
ISSN:0734-2101
-
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
-
language:en
-
Short-container-title:J. Vac. Sci. Technol. A
Author:
Nemanič Vincenc,Žumer Marko,Zajec Bojan
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics