Hot embossing by Joule heating
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Published:2008
Issue:1
Volume:26
Page:260
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ISSN:1071-1023
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Lee J. C.,Leu I. C.,Lai K. L.,Hon M. H.
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by
1 articles.
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