Electrolyte-insulator-semiconductor devices with different integrated reference electrodes for pH detection-Reference-Cited by-同舟云学术

Electrolyte-insulator-semiconductor devices with different integrated reference electrodes for pH detection

Published:2018-05 Issue:3 Volume:36 Page:03E106
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

César Rodrigo Reigota¹,Pascon Aline Maria²,Doi Ioshiaki¹,Diniz José Alexandre¹

Affiliation:

1. Center for Semiconductor Components and Nanotechnologies (CCSNano), University of Campinas, CEP 13083-870 Campinas, São Paulo, Brazil and School of Electrical and Computer Engineering, University of Campinas, P. Box 6101, 13083-970 Campinas, São Paulo, Brazil

2. Center for Semiconductor Components and Nanotechnologies (CCSNano), University of Campinas, CEP 13083-870 Campinas, São Paulo, Brazil

Funder

Namitec

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior

Conselho Nacional de Desenvolvimento Científico e Tecnológico

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5022160

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