Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model-Reference-Cited by-同舟云学术

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

Published:2019-11 Issue:6 Volume:37 Page:062921
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Ohlídal Ivan¹,Vohánka Jiří¹,Buršíková Vilma¹,Ženíšek Jaroslav¹,Vašina Petr¹,Čermák Martin¹,Franta Daniel¹

Affiliation:

1. Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlářská 2, 61137 Brno, Czech Republic

Funder

Ministry of Education, Youth and Sports of the Czech Republic

Czech Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5122014

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