Fluoropolymer films produced by sputtering using inductively coupled plasma ion source and their organic vapor sorption characteristics
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Published:1998-11
Issue:6
Volume:16
Page:3359-3365
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Sugimoto Iwao,Hannoe Shinsuke,Katoh Tadashi
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics