Temperature dependence of resistivity of Si–Ta film deposited by magnetron sputtering
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Published:2005-05
Issue:3
Volume:23
Page:503-505
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Berlicki T. M.,Prociów E. L.,Brzeziński J.,Osadnik S. J.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics