Plasma diagnostics of magnetic field assisted ionized magnetron sputtering
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.581914
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High-Power Inductively Coupled Impulse Sputtering Glow Plasma;IEEE Transactions on Plasma Science;2011-11
2. Computational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma Systems;Journal of the Korean Vacuum Society;2009-05-30
3. Performance of inductively coupled plasma assisted sputtering with internal coil for ferromagnetic CoCrTa film deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2004-01
4. Application of inductively coupled plasma to super-hard and decorative coatings;Surface and Coatings Technology;2003-06
5. Low-temperature polysilicon deposition by ionized magnetron sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2000-07
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