Growth mechanism of cubic boron nitride thin films by ion beam assist sputter deposition-Reference-Cited by-同舟云学术

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Growth mechanism of cubic boron nitride thin films by ion beam assist sputter deposition

Published:1997-05 Issue:3 Volume:15 Page:1041-1047
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Park K. S.,Lee D. Y.,Kim K. J.,Moon D. W.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580427

Cited by 38 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microstructural characterization of nanocrystalline hexagonal boron nitride thin films deposited by ion-beam assisted pulsed laser deposition;Surface and Coatings Technology;2024-07

2. Layer-selective growth of 2D hexagonal boron nitride using two-step chemical vapor deposition;Vacuum;2023-07

3. FePt–BN granular HAMR media with high grain aspect ratio and high L1 ordering on corning LotusTM NXT glass;AIP Advances;2023-03-01

4. Post-growth enhancement of CVD-grown hexagonal boron nitride films on sapphire;Results in Materials;2022-12

5. Synthesis of hexagonal boron nitride films on silicon and sapphire substrates by low-pressure chemical vapor deposition;Thin Solid Films;2021-09

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