In-place fabrication of nanowire electrode arrays for vertical nanoelectronics on Si substrates-Reference-Cited by-同舟云学术

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In-place fabrication of nanowire electrode arrays for vertical nanoelectronics on Si substrates

Published:2007 Issue:2 Volume:25 Page:343
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Franklin Aaron D.,Maschmann Matthew R.,DaSilva Manuel,Janes David B.,Fisher Timothy S.,Sands Timothy D.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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