Energy broadening of an electron optical line source
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Published:1989-11
Issue:6
Volume:7
Page:1878
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
2 articles.
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1. A line beam electron gun for rapid thermal processing;Review of Scientific Instruments;1992-04
2. An electron beam line probe with variable aspect ratio;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-11