Effects of electron-beam irradiation on the properties of CN thin films deposited by direct dual ion beams
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.1330256
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Room temperature deposition of crystalline indium tin oxide films by cesium-assisted magnetron sputtering;Applied Surface Science;2008-08
2. Charge Assisted Deposition of Polycrystalline Silicon Thin Films by Cesium Sputter Ion Beam Deposition;Japanese Journal of Applied Physics;2004-10-08
3. Characteristics of DLC films by DC magnetron sputtering incorporated with cesium;Vacuum;2004-01
4. A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2003-07
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