Metal induced crystallization of amorphous silicon-Reference-Cited by-同舟云学术

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Metal induced crystallization of amorphous silicon

Published:1987-07 Issue:4 Volume:5 Page:1447-1450
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Robertson A. E.,Hultman L. G.,Hentzell H. T. G.,Hörnström S.‐E.,Shaofang G.,Psaras P. A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.574618

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrical and material characteristics of metal–silicon silicides;Integrated Silicon-Metal Systems At the Nanoscale;2023

2. A review of thermal processing in the subsecond range: semiconductors and beyond;Semiconductor Science and Technology;2016-09-01

3. Formation of regularly arranged large grain silicon islands by using embedded micro mirrors in the flash crystallization of amorphous silicon;Journal of Applied Physics;2014-01-21

4. Tungsten diffusion in silicon;Journal of Applied Physics;2014-01-07

5. Polycrystalline silicon thin films by aluminum induced crystallization of amorphous silicon;Applied Surface Science;2013-01

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