Proximity effect in beam‐addressed metal‐oxide semiconductor memory
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Published:1978-05
Issue:3
Volume:15
Page:1064-1066
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Parikh M.,Heritage M.
Publisher
American Vacuum Society
Subject
General Engineering