Texture and phase variation of ALD PbTiO3 films crystallized by rapid thermal anneal-Reference-Cited by-同舟云学术

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Texture and phase variation of ALD PbTiO3 films crystallized by rapid thermal anneal

Published:2019-03 Issue:2 Volume:37 Page:020917
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Strnad Nicholas A.¹²,Potrepka Daniel M.³,Pulskamp Jeffrey S.³,Liu Yang⁴,Jones Jacob L.⁴,Phaneuf Raymond J.¹,Polcawich Ronald G.³

Affiliation:

1. Department of Materials Science and Engineering, University of Maryland, 4418 Stadium Drive, College Park, Maryland 20742

2. General Technical Services, LLC, 1451 Route 34, South—Suite 301, Wall Township, New Jersey 07727

3. Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, Maryland 20783

4. Department of Materials Science and Engineering, North Carolina State University, 911 Partners Way, Raleigh, North Carolina 27695

Funder

National Science Foundation

National Nanotechnology Initiative

U.S. Army Materiel Command

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5080226

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1. Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance;2023 IEEE/ION Position, Location and Navigation Symposium (PLANS);2023-04-24

2. The other model antiferroelectric: PbHfO3 thin films from ALD precursors;APL Materials;2021-02-01

3. Ferroelectric Gating of Narrow Band-Gap Nanocrystal Arrays with Enhanced Light–Matter Coupling;ACS Photonics;2021-01-07

4. Growth of thin film ferroelectric PZT, PHT, and antiferroelectric PHO from atomic layer deposition precursors;Journal of the American Ceramic Society;2020-11-05

5. Atomic layer deposition of functional multicomponent oxides;APL Materials;2019-11-01

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