Optical properties of surface grated Si-based multilayer structure-Reference-Cited by-同舟云学术

Optical properties of surface grated Si-based multilayer structure

Published:2019-11 Issue:6 Volume:37 Page:061807
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Bayramov Ayaz¹,Alizade Elvin¹,Mammadov Samir²,Tavkhelidze Avtandil³,Mamedov Nazim¹,Aliyeva Yegana¹,Ahmedova Khuraman¹,Asadullayeva Saida¹,Jangidze Larissa⁴,Skhiladze Givi⁴

Affiliation:

1. Institute of Physics, Azerbaijan National Academy of Sciences. H. Javid 131, Az 1143 Baku, Azerbaijan

2. InstitutfürPhysik, TU Chemnitz, Reichenhainer Str. 70, 09126 Chemnitz, Germany

3. Ilia State University, Cholokashviliave. 3-5, 0162 Tbilisi, Georgia

4. Institute of Micro and Nanoelectronics, Chavchavadze Ave. 13, 0162 Tbilisi, Georgia

Funder

Azerbaijan National Academy of Sciences

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5120799

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