Brightness measurements of the nano-aperture ion source

Author:

van Kouwen Leon1,Kruit Pieter1

Affiliation:

1. Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands

Funder

Stichting voor Fundamenteel Onderzoek der Materie

Thermo Fisher Scientific

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Roadmap for focused ion beam technologies;Applied Physics Reviews;2023-12-01

2. FANM: A software for focus and aberrations of nuclear microprobe;Ultramicroscopy;2021-01

3. Expanding the Application Space of Ion Microscopy;Applications of Microscopy in Materials and Life Sciences;2021

4. Considerations for the nano aperture ion source: Geometrical design and electrical control;Review of Scientific Instruments;2020-01-01

5. Introduction to focused ion beams, ion sources, and the nano-aperture ion source;Advances in Imaging and Electron Physics Including Proceedings CPO-10;2019

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