Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas
Author:
Affiliation:
1. LPICM, CNRS, École Polytechnique, 91128 Palaiseau, France
2. SOLAYL SAS, 91400 Orsay, France
3. LPP, CNRS, École Polytechnique, UPMC Univ. Paris-sud, Sorbonne Universités, 91128 Palaiseau, France
Funder
Conseil Départemental de l'Essonne
École Polytechnique, Université Paris-Saclay
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5056205
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