Semiquantitative subplantation model for low energy ion interactions with surfaces. II. Ion beam deposition of carbon and carbon nitride-Reference-Cited by-同舟云学术

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Semiquantitative subplantation model for low energy ion interactions with surfaces. II. Ion beam deposition of carbon and carbon nitride

Published:1998-03 Issue:2 Volume:16 Page:455-462
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Marton D.,Boyd K. J.,Rabalais J. W.,Lifshitz Y.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581043

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion Beam-Assisted Deposition;Low-Energy Ion Irradiation of Materials;2022

2. Ion Beam Deposition and Cleaning;Low-Energy Ion Irradiation of Materials;2022

3. EFFECTS OF ELECTRODE DISTANCE ON MECHANICAL AND TRIBOLOGICAL PROPERTIES OF HYDROGENATED DLC FILMS DEPOSITED BY DC-PULSE PECVD;Surface Review and Letters;2020-10-22

4. Growth of ta-C Films;Tetrahedrally Bonded Amorphous Carbon Films I;2018

5. Influence of Deposition Conditions;Tetrahedrally Bonded Amorphous Carbon Films I;2018

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