Self‐consistent proximity effect correction technique for resist exposure (SPECTRE)
-
Published:1978-05
Issue:3
Volume:15
Page:931-933
-
ISSN:0022-5355
-
Container-title:Journal of Vacuum Science and Technology
-
language:en
-
Short-container-title:Journal of Vacuum Science and Technology
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
94 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献