Author:
Kim Byungwhan,Kwon Kwang-Ho,Park Sang-Ho
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
25 articles.
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1. Deep reactive ion etching;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Reactive ion etching (CF4/Ar) and ion beam etching of various glasses for diffractive optical element fabrication;International Journal of Applied Glass Science;2018-07-16
3. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. Echelle dif fraction grating based high-resolution spectrometer-on-chip on SiON waveguide platform;Chinese Optics Letters;2013
5. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2010