Process monitoring of a‐C:H plasma deposition
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.574962
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1. Probe temperature effect on the curling probe and its correction technique;Plasma Sources Science and Technology;2022-07-01
2. The effects of deposition conditions on hydrogenation, hardness and elastic modulus of W-C:H coatings;Journal of the European Ceramic Society;2020-07
3. Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis;Carbon Letters;2020-05-06
4. Hydrogenation and hybridization in hard W-C:H coatings prepared by hybrid PVD-PECVD method with methane and acetylene;International Journal of Refractory Metals and Hard Materials;2020-04
5. Optical emission spectroscopy as a process-monitoring tool in plasma enhanced chemical vapor deposition of amorphous carbon coatings - multivariate statistical modelling;Thin Solid Films;2018-03
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