Fabrication of electrically conductive metal oxide coatings by reactive ion plating
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Published:1985-11
Issue:6
Volume:3
Page:2661-2664
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Hock V. F.,Stephenson L. D.,Givens J. H.,Rigsbee J. M.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics