A theoretical performance comparison of six electrostatic e-beam deflectors-Reference-Cited by-同舟云学术

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A theoretical performance comparison of six electrostatic e-beam deflectors

Published:1986-09 Issue:5 Volume:4 Page:1237
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Schaefer Christoph H.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Complementary split-ring resonator-based deflecting structure;Physical Review Special Topics - Accelerators and Beams;2013-09-16

2. An electrostatic deflection system;Instruments and Experimental Techniques;2007-09

3. Low energy large scan field electron beam column for wafer inspection;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004

4. Improved focusing-and-deflection columns;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-07

5. Synthesis of focusing-and-deflection columns;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-03

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