Microstructure and mechanical properties of superhard Ti–B–C–N films deposited by dc unbalanced magnetron sputtering-Reference-Cited by-同舟云学术

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Microstructure and mechanical properties of superhard Ti–B–C–N films deposited by dc unbalanced magnetron sputtering

Published:2005 Issue:2 Volume:23 Page:588
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Park In-Wook,Kim Kwang Ho,Kunrath Augusto O.,Zhong Dalong,Moore John J.,Voevodin A. A.,Levashov E. A.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 36 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of B/C ratio on the structural and mechanical properties of TiBCN coating deposited by PACVD;Ceramics International;2023-08

2. Effects of Copper Content on the Microstructural, Mechanical and Tribological Properties of TiAlSiN–Cu Superhard Nanocomposite Coatings;Coatings;2022-12-19

3. Magnetron sputtered titanium carbide-based coatings: A review of science and technology;Vacuum;2022-03

4. Effects of substrate temperature and reactive gas flow rate on the crystalline ceramic phases formation and tribological properties of W–Ti–Co–C–N thin films produced by co-sputtering;Ceramics International;2020-12

5. Microstructure and multifunctional properties of Ti–Si–B–C coatings by plasma-enhanced chemical vapour deposition;Surface Engineering;2016-06-02

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