Effects of Zn content on structural and transparent conducting properties of indium-zinc oxide films grown by rf magnetron sputtering-Reference-Cited by-同舟云学术

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Effects of Zn content on structural and transparent conducting properties of indium-zinc oxide films grown by rf magnetron sputtering

Published:2006 Issue:6 Volume:24 Page:2737
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Park Jae-Soung,Song Ju-Il,Heo Young-Woo,Lee Joon-Hyung,Kim Jeong-Joo,Lim W. T.,Stafford L.,Norton D. P.,Pearton S. J.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical and Optoelectronic Properties Enhancement of Porous Silicon Treated with Indium Oxide;Silicon;2019-03-26

2. Physical properties enhancement of porous silicon treated with In2O3 as a antireflective coating;Results in Physics;2019-03

3. Structural and Optical Characteristics of Zn-Rich In2O3–SnO2–ZnO (ITZO) Thin Films Prepared by Radio Frequency Magnetron Sputtering;Journal of Nanoelectronics and Optoelectronics;2017-06-01

4. Composition-dependent crystallization enhancing moisture-barrier performance in In–Zn–O thin films;Materials Letters;2015-11

5. Fabrication and Characterization of Fully Transparent ZnO Thin-Film Transistors and Self-Switching Nano-Diodes;Journal of Physics: Conference Series;2015-10-13

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