Thin‐film deposition using low‐energy ion beams (2) Pb+ ion‐beam deposition and analysis of deposits-Reference-Cited by-同舟云学术

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Thin‐film deposition using low‐energy ion beams (2) Pb+ ion‐beam deposition and analysis of deposits

Published:1977-03 Issue:2 Volume:14 Page:690-694
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Amano J.,Lawson R. P. W.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.569184

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reactive diffusion in Sc/Si multilayer X-ray mirrors with CrB2 barrier layers;Applied Physics A;2011-04-14

2. Incident-energy dependence of crystalline structures of ion beam deposited Au thin films;Philosophical Magazine;2007-02-16

3. Broad fast neutral molecule beam sources for industrial-scale beam-assisted deposition;Surface and Coatings Technology;2002-07

4. Construction, characterization and applications of a compact mass-resolved low-energy ion beam system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07

5. DIRECT ION BEAM DEPOSITION;Ion Beam Assisted Film Growth;1989

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