Synthesis of BNx–SiNy composite films by multisource plasma chemical vapor deposition
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Published:2001-09
Issue:5
Volume:19
Page:2039-2042
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Nonogaki Ryozo,Yamada Suzuya,Ibukiyama Masahiro,Wada Tetsuya
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics