Microstructural and chemical analysis of polycrystalline LiNbO3 films obtained by room-temperature RF sputtering after various annealing durations
Author:
Affiliation:
1. CEA, LETI, MINATEC, 38000 Grenoble, France
2. IEMN-DOAE-MIMM, CNRS UMR 8520, Université Polytechniques Haut de France, 59300 Valenciennes, France
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/6.0000209
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