Author:
Nishimori Yuki,Ueki Shinji,Miwa Kazuhiro,Kubota Tomohiro,Sugiyama Masakazu,Samukawa Seiji,Hashiguchi Gen
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology;Journal of Micromechanics and Microengineering;2014-07-04
2. Low-damage silicon etching using a neutral beam;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-09