Synthesis and characterization of large-grain solid-phase crystallized polycrystalline silicon thin films-Reference-Cited by-同舟云学术

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Synthesis and characterization of large-grain solid-phase crystallized polycrystalline silicon thin films

Published:2014-11 Issue:6 Volume:32 Page:061509
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kumar Avishek,Law Felix,Dalapati Goutam K.,Subramanian Gomathy S.,Widenborg Per I.,Tan Hui R.,Aberle Armin G.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4897298

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of passivation property using thin Al2O3 layer and simulation for realization of high-efficiency TOPCon cell;Infrared Physics & Technology;2020-11

2. Effects of boron doping on solid phase crystallization of in situ doped amorphous Silicon thin films prepared by electron beam evaporation;Thin Solid Films;2020-01

3. Influence of Polysilicon Deposition Conditions on Advanced 3D NAND;ECS Journal of Solid State Science and Technology;2019

4. Sputtering pressure effects on microstructure and grain orientation distribution in FePt thin films;Journal of Materials Science: Materials in Electronics;2017-05-24

5. Uniform dehydrogenation of amorphous silicon thin films using a wide thermal annealing system;Semiconductor Science and Technology;2017-01-09

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