1.5 nm fabrication of test patterns for characterization of metrological systems-Reference-Cited by-同舟云学术

1.5 nm fabrication of test patterns for characterization of metrological systems

Published:2015-11 Issue:6 Volume:33 Page:06FL01
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Babin Sergey,Calafiore Giuseppe,Peroz Christophe,Conley Raymond¹,Bouet Nathalie²,Cabrini Stefano,Chan Elaine,Lacey Ian,McKinney Wayne R.,Yashchuk Valeriy V.,Vladar Andras E.³

Affiliation:

1. Argonne National Laboratory, 9700 S Cass Ave., Argonne, Illinois 60439 and Brookhaven National Laboratory, 98 Rochester St., Upton, New York 11973

2. Brookhaven National Laboratory, 98 Rochester St., Upton, New York 11973

3. National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899

Funder

DOE

DOE STTR

UC office of President

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4935253

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