Characterization of worn Ti–Si cathodes used for reactive cathodic arc evaporation-Reference-Cited by-同舟云学术

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Characterization of worn Ti–Si cathodes used for reactive cathodic arc evaporation

Published:2010-03 Issue:2 Volume:28 Page:347-353
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Zhu J. Q.,Eriksson A.,Ghafoor N.,Johansson M. P.,Sjölén J.,Hultman L.,Rosén J.,Odén M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3330767

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Arc erosion property and mechanism of tungsten–copper alloy with multi-scale tungsten particles;Journal of Materials Science;2024-01

2. Structural Transformations on the Surface of Al-Ti Cathodes Subjected to Vacuum Arc Heating;Coatings;2023-11-07

3. Rapid solidification and metastable phase formation during surface modifications of composite Al-Cr cathodes exposed to cathodic arc plasma;Journal of Materials Science & Technology;2021-12

4. Insights into surface modification and erosion of multi-element arc cathodes using a novel multilayer cathode design;Journal of Applied Physics;2020-03-21

5. Effect of Ti-Al cathode grain size on plasma generation and thin film synthesis from a direct current vacuum arc plasma source;AIP Advances;2019-04

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