The retardation of aluminum-amorphous silicon interaction by phosphine plasma treatment
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.581074
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Aluminum–silicon interdiffusion in silicon heterojunction solar cells with a-Si:H(i)/a-Si:H(n/p)/Al rear contacts;Journal of Physics D: Applied Physics;2021-02-04
2. Aluminum induced crystallization of amorphous silicon: Microstructural and crystallographic investigations;2007 International Workshop on Physics of Semiconductor Devices;2007-12
3. In situX-ray diffraction studies of aluminium-induced crystallization of hydrogenated amorphous silicon;Journal of Applied Crystallography;2003-09-08
4. Atomic force microscopy and x-ray diffraction studies of aluminum-induced crystallization of amorphous silicon in Al/α-Si:H, α-Si:H/Al, and Al/α-Si:H/Al thin film structures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003
5. Aluminum-Induced Crystallization of Amorphous Silicon (α-Si:H) at 150°C;Electrochemical and Solid-State Letters;2001
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