Study of Al with a combined Auger electron spectrometer–ellipsometer system
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Published:1976-01
Issue:1
Volume:13
Page:112-115
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
30 articles.
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3. Roughness measurements of Si and Al by variable angle spectroscopic ellipsometry;Applied Optics;1991-08-01
4. Ellipsometry in Studies of Metallic Corrosion and Oxidation;Electrochemical and Optical Techniques for the Study and Monitoring of Metallic Corrosion;1991
5. 252Cf-particle desorption mass spectrometry in a depth profiling mode;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1988-07