Low-temperature Si epitaxial growth on oxide patterned wafers by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition
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Published:2001
Issue:2
Volume:19
Page:323
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Yuh Hwan-Kuk,Park Jin-Won,Lim Seung-Hyun,Hwang Ki-Hyun,Yoon Euijoon
Publisher
American Vacuum Society
Subject
General Engineering