Structure of sputtered nanocomposite CrC[sub x]∕a-C:H thin films-Reference-Cited by-同舟云学术

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Structure of sputtered nanocomposite CrC[sub x]∕a-C:H thin films

Published:2006 Issue:4 Volume:24 Page:1837
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Gassner G.,Patscheider J.,Mayrhofer P. H.,Hegedus E.,Tóth L.,Kovacs I.,Pécz B.,Srot V.,Scheu Ch.,Mitterer C.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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