Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed on Si(100)
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Published:2014-05
Issue:3
Volume:32
Page:031503
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Xu Peng,Kubart Tomas,Gao Xindong,Wu Dongping,Zhang Shi-Li
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics