Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication-Reference-Cited by-同舟云学术

Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication

Published:2020-01 Issue:1 Volume:38 Page:012207
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Dey Ripon Kumar¹^ORCID,Ekinci Huseyin¹²^ORCID,Cui Bo¹

Affiliation:

1. Department of Electrical and Computer Engineering and Waterloo Institute for Nanotechnology (WIN), University of Waterloo, 200 University Ave. West, Waterloo, Ontario N2L 3G1, Canada

2. Department of Physics, Faculty of Arts and Sciences, Erzincan Binali Yildirim University, 24100 Erzincan, Turkey

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5123601

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