Focused ion beam micromachining for transmission electron microscopy specimen preparation of semiconductor laser diodes-Reference-Cited by-同舟云学术

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Focused ion beam micromachining for transmission electron microscopy specimen preparation of semiconductor laser diodes

Published:1992-03 Issue:2 Volume:10 Page:575
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Szot J.

Publisher

American Vacuum Society

Subject

General Engineering

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