Direct nanoimprint of inorganic-organic hybrid glass
Author:
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Glass in Integrated Photonics;Springer Handbook of Glass;2019
2. Elliptical concave microlens arrays built in the photosensitive TiO2/ormosils hybrid films;Optics Communications;2014-11
3. Fabrication of ridge waveguide structure from photosensitive TiO2/ormosil hybrid films by using an ultraviolet soft imprint technique;Thin Solid Films;2013-03
4. Recent progress in direct patterning technologies based on nano-imprint lithography;The European Physical Journal Applied Physics;2012-07
5. Atomic step patterning in nanoimprint lithography: Molecular dynamics study;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11
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