A high precision profilometer based on vertical scanning microscopic interferometry-Reference-Cited by-同舟云学术

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A high precision profilometer based on vertical scanning microscopic interferometry

Published:2008-06 Issue:3 Volume:12 Page:255-260
ISSN:1007-6417
Container-title:Journal of Shanghai University (English Edition)
language:en
Short-container-title:J. Shanghai Univ.(Engl. Ed.)

Author:

Dai Rong,Xie Tie-bang,Gong Wen,Chang Su-ping

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Mathematics

Link

http://link.springer.com/content/pdf/10.1007/s11741-008-0312-2.pdf

Reference17 articles.

1. James C W. Advance in interferometric metrology [C]//Optical Design and Testing, Shanghai. [S.l.]: SPIE, 2002, 4927: 154–162.

2. Kitagawa K. Recent trends in white-light interferometry [C]//Two-and Three-Dimensional Methods for Inspection and Metrology IV, Boston, MA. [S.l.]: SPIE, 2006, 6382: 134–141.

3. Wyko NT9100 optical profiler [EB/OL]. [2007-05-07]. http://www.veeco.com.cn/products/details.php?cat=1 & sub=5 & pid=379 .

4. Caber P J, Martinek S J, Niemann R J. A new interferometric profiler for smooth and rough surfaces [C]//Laser Dimensional Metrology: Recent Advances for Industrial Application, Brighton. [S.l.]: SPIE, 1993, 2088: 195–203.

5. Gordon S K, Stanley S C C. Mirau correlation microscope [J]. Applied Optics, 1990, 29(26): 3775–3783.

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