2-D nano-positioning system for AFM based on H ∞ control

Author:

Sun Xin,Jin Xiao-ping,Cheng Chuan-dong,Tang Shen-jian

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Mathematics

Reference7 articles.

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2. Tang Yu-zhao, Zhang Xiao-dong, Sun Jie-lin, Hu Jun. Reposition imaging technique of AFM with programcontrolled sample stage [J]. Modern Instruments, 2007, 13(3): 28–31 (in Chinese).

3. Fang Sheng, Zhang Zhao-hui, Gai Zheng, Zhao Ruguang Yang Wei-sheng. Design and test of the nanostructure reaccessible UHVSTM system [J]. Journal of Chinese Electron Microscopy Society, 1999, 18(1): 151–156 (in Chinese).

4. Su M, Pan Z, Dravid V P. A convenient and rapid sample repositioning approach for atomic force microscopy [J]. Journal of Microscopy, 2004, 216(2): 194–196.

5. Hong T, Chang T N. Control of nonlinear piezoelectric stack using adaptive dither [C]// Proceedings of the American Control Conference, Seattle, Washington DC. 1995: 76–80.

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