Author:
Pensl G.,Schulz M.,H�lzlein K.,Bergholz W.,Hutchison J. L.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science
Reference37 articles.
1. W. Zulehner, D. Huber: InCrystals Vol. 8 (Springer, Berlin, Heidelberg 1982) p. 1
2. J.H. Matlock: Silicon Processing, ASTM STP 804, ed. by D.C. Gupta (American Society for Testing and Materials 1983) p. 332
3. L. Jastrzebski, R. Soydan, J. McGinn, R. Kleppinger, M. Blumenfeld, G. Gillespie, N. Arnold, B. Goldsmith, W. Henry, S. Vecumbra: J. Electrochem. Soc.134, 1018 (1987)
4. K. Hölzlein, G. Pensl, M. Schulz, P. Stolz: Rev. Sci. Instrum.57, 1373 (1986)
5. J. Patel, W. Jackson, H. Reiss: J. Appl. Phys.48, 5279 (1977)
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