A Discussion About Hydrogen Diffusion in n+pp+ Polysilicon Solar Cells Following Analysis of Both Dopant Deactivation and Defects Passivation
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Publisher
Springer Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-16-0378-5_22
Reference12 articles.
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3. D. Madi, P. Prathap, A. Slaoui, Role of MW-ECR hydrogen plasma on dopant deactivation and open-circuit voltage in crystalline silicon solar cells. Appl. Phys. A 118, 231–237 (2015)
4. T. Zundel, A. Mesli, J.C. Muller, P. Siffert, Boron neutralization and hydrogen diffusion in silicon subjected to low-energy hydrogen implantation. Appl. Phys. A 48, 31–40 (1988)
5. S.K. Estreicher, L. Throckmorton, D.S. Marynick, Hydrogen passivation of shallow acceptors and donors in c-Si: comparisons and trends. Phys. Rev. B 39, 13241–13251 (1989)
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