Analysis of Tunnelling Probability of Different High-K Material for Nanometer Thickness MOSFET Gate

Author:

Sarkar Avijit Deb

Publisher

Springer Nature Singapore

Reference24 articles.

1. Arden, W., et al.: “More-than-Moore” White Paper, International Technology Roadmap for Semiconductors, ITRS 2010 update. http://www.itrs.net

2. Darbandy, G., Lime, F., Cerdeira, A., Estrada, M., Garduño, I., Iñiguez, B., et al.: Study of potential high-k dielectric for UTB SOI MOSFETs using analytical modeling of the gate tunneling leakage

3. Depas, M., Vermeire, B., Mertens, P.W., Van Meirhaeghe, R.L., Heyns, M.M.: Determination of tunneling parameters in ultra-thin oxide layer poly-Si/SiO2/Si structures. Solid-State Electron. 38, 1465 (1995)

4. Lo, S.H., Buchanan, D.A., Taur, Y., Wang, W.: Quantum-mechanical modeling of electron tunneling current from the inversion layer of ultra-thin-oxide nMOSFET’s. IEEE Electron Device Lett. 18, 209 (1997)

5. Yeo, Y.C., Lu, Q., Lee, W.C., King, T.-J., Hu, C., Wang, X., Guo, X., Ma, T.P.: Direct Tunneling Gate Leakage Current in Transistors with Ultrathin Silicon Nitride Gate Dielectric, 11 November 2000

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