An Intelligent Polarimetric System for High-Throughput and High-Sensitivity Quality Assessment of Commercial Semiconductor Wafers

Author:

Setomura Shun,Arai Nao,Kimura Yuta,Fukuzawa MasayukiORCID

Publisher

Springer Nature Singapore

Reference10 articles.

1. Runyan, W.R., Shaffner, T.J.: Semiconductor Measurements and Instrumentation, 2nd edn. The McGraw-Hill Companies Inc, United States of America (1998)

2. Schroder, D.K.: Semiconductor Material and Device Characterization, 3rd edn. Wiley, United States of America (2006)

3. Yamada, M.: High-sensitivity computer-controlled infrared polariscope. Rev. Sic. Instrum. 64(7), 1815–1821 (1993)

4. Fukuzawa, M., Yamada, M.: Proceedings of IPRM2008 (2008)

5. Fukuzawa, M., Yamada, M.: J. Cryst. Growth 229, 22–25 (2001)

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